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Equipment

Semiconductor LCD Image General

Semiconductor

Single Batch Cleaning System Single Batch Cleaning System
For both 5,6 inch cassetteless process
Unitization of the frame improved the efficiency of the restoration at the worksite and shortened the time for a major remodeling such as the configuration of the device.
Single Wafer Cleaning System Single Wafer Cleaning System
High uniformity/Promote the low-emission
This Production model provides new wet-process replacing RCA cleaning system with the high temperature heating, heavy exhaust, and massive chemical consumption.
Brushing Scrub Cleaning System Brushing Scrub Cleaning System
Equipped with a self-detect function of extrusion pressure
It provides a high removal efficiency of particles by using this system before the receiving cleaning, resist coating, or CVD and after the deposition such as sputter.
Batch Type Oxide film Etching System Batch Type Oxide film Etching System
4,5,6 inch wafers/Process 1 patch for every 50 pieces/Rotary dry (automatic balancing function)
Wafer ID Recognition Unit Wafer ID Recognition Unit
This system identifies/defines a specific ID marked on a wafer.
Chemical Concentration Monitoring System Chemical Concentration Monitoring System
System to be used to measure the chemistry concentration of processing solution used during the semiconductor cleaning process. This achieves concentration monitoring and control.

LCD

Flat-Panel Cleaning System Flat-Panel Cleaning System
Advancement of Technology of Ultrasonic air and process yield
This system provides dry cleaning of the surface (both sides) of various flat-panel discs such as LCD Glass (Color filter) and PDP Glass. Moreover, the operation is done without any contact with Glass, and it is possible to remove particles of a few microns in size.
Unpacking Station Unpacking Station
Interplant transportation of LSD Glass needs packaging boxes such as special PP cases. During the process, Glass should be put into those cases and loaded on a conveyor one at a time to be transferred to the downstream device. This Unpacking station does the interchanging automatically.
Transcriptional Laser Marker Transcriptional Laser Marker
SEFATEC Original Transcriptional Marking
The conventional Marking methods as denudation or printing had been factors of generating particles. The transcriptional Laser Marker has been developed to restrain particles.
Visual Inspection Table Visual Inspection Table
Visual inspection table with smooth operation
The external of Glass can be inspected visually for any dust, crack, or unevenness by using Green lamp, Sodium lamp, fluorescent, and etc. Operators need to load Glass by hands. By enlarging the image using a CCD camera, it provides more accurate inspections.
Inline Visual Inspection Inline Visual Inspection
Compatible to Advanced large glass
Laborsaving by Automatic transfer system
This inspection stage gives external visual checks of Glass substrate that is loaded automatically for any dust, crack, unevenness, etc by green lamp, sodium lamp, or fluorescent.
Packing Station Packing Station
Compatible to Advanced large glass
With this unloader, it is possible to store Glass transferred from the upstream device into PP case one at a time.
Packing the PP case with plastic and banding it with PP bands are also available.
This is the essential device for an upsizing advanced Glass.

Image

Auto-inspection System for characteristics(Type 1) Auto-inspection System for characteristics(Type 1)
System to be used to test the record/replay characteristics of the magnetic-head.
Auto-inspection System for  characteristics(Type 2) Auto-inspection System for characteristics(Type 2)
System to be used to test the record/replay characteristics of the magnetic-head.
Polisher prior to GD Recognition(Type 1) Polisher prior to GD Recognition(Type 1)
System to be used to measure and polish the gap depth of the magnetic-head by the submicron.
Polisher prior to GD Recognition(Type 2) Polisher prior to GD Recognition(Type 2)
System to be used to measure and polish the gap depth of the magnetic-head by the submicron.
Chip Inspection System Chip Inspection System
System to be used to inspect the size of the magnetic-head chip.
All-in-one Front polisher All-in-one Front polisher
System to be used to measure and polish the gap depth of the magnetic-head by the submicron.
Interference fringe Inspection System Interference fringe Inspection System
System to be used to inspect and classify the 3-D shape of the part of the magnetic-head to touch with the tape.
Azimuth Inspection System Azimuth Inspection System
System to be used to measure the gap angle of the magnetic-head with high degree of accuracy and classify.
Inspection System for azimuth/jut/index Inspection System for azimuth/jut/index
System to be used to measure the size of each parts of the magnetic-head cylinder.
Rank Classifier Rank Classifier
System to be used to measure the gap depth of the magnetic-head by the submicron and make demarcations according to rank.
Dimension gage Dimension gage
Support unit to measure each size of the magnetic-head.
Interference fringes Inspection Microscope Unit Interference fringes Inspection Microscope Unit
System to be used to inspect the 3-D shape of the part of the magnetic-head to touch with the tape.
Adhesive device for Lens holder Adhesive device for Lens holder
Systems to be used to align an image pickup device and a lens holder by the micron and adhere.

General

Laser Marker Laser Marker
Marking System using YAG laser.
VsVn Measuring System VsVn Measuring System
System to be used to measure and inspect the electromotive force and noise of the UV sensor.
Equipment for assessing purified water module Equipment for assessing purified water module
System to be used to assess the performance of the Gas dissolving module/It measures the concentration of CO2 in purified water.
UV Curing System UV Curing System
Curing oven for ultraviolet cure resin.
Plate thickness gage Plate thickness gage
System to inspect the thickness of the plate device.
Plate Aligner Plate Aligner
Alignment adhesive System of the plate device.
Continuity Test System Continuity Test System
System to be used to test the continuity of the magnetic-head.
Transfer system for characteristic test Transfer system for characteristic test
Loader/Unloader unit of Test System.
Wrapping System for block Wrapping System for block
System to be used to wrap the surface of the Magnetic head block.
Remote Focusing System Remote Focusing System
Unit to be used to operate the focus knob of the microscope by remote control.
Thermocompressioner for heat seal Thermocompressioner for heat seal
Desktop Airblow System Desktop Airblow System
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